专题：Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
最新文献
Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex

Microwave Capacitive Pressure Sensor Based on an Additively Manufactured Elastic Layer

article Full Text OpenAlex

Box-Behnken Design for Optimization of Particle Swarm Optimizer for Artificial Neural Networks: Application to Lab-on-a-Disc Biosensors

article Full Text OpenAlex

MEMS capacitive pressure sensor: analysis, theoretical modeling, simulation and performance comparison of the effect of a conical notch

article Full Text OpenAlex

Self-calibration for phase shift in Coriolis vibratory gyroscope with whole-angle mode operation

article Full Text OpenAlex

A hybrid piezoelectric–electromagnetic body energy harvester: design and experiment validation

article Full Text OpenAlex

A Comparative Study on Synergy Between Energy Harvesting and Pressure Sensing in Piezotronic Heterojunctions

article Full Text OpenAlex

Miniaturized Terahertz Heterodyne Radiometer With 183-GHz Subharmonic Mixer and 91-GHz Frequency Tripler for Water Vapor Sensing in CubeSat

article Full Text OpenAlex

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ±100 ppb over industrial temperature range

article Full Text OpenAlex

A new FEM-based approach on the modeling of stress-induced velocity shift of piezoelectric surface acoustic wave resonators

article Full Text OpenAlex

近5年高被引文献
Computational Electrodynamics

book Full Text OpenAlex 869 FWCI10.75824483

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

review Full Text OpenAlex 369 FWCI23.01203716

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

article Full Text OpenAlex 356 FWCI351.42542496

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

review Full Text OpenAlex 343 FWCI38.07209787

Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex 301 FWCI111.11971028

Cavity optomechanical sensing

article Full Text OpenAlex 199 FWCI18.31440388

Microelectromechanical Systems (MEMS) for Biomedical Applications

review Full Text OpenAlex 183 FWCI19.69934981

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

article Full Text OpenAlex 174 FWCI19.31354236

A method for quantitatively separating the piezoelectric component from the as-received “Piezoelectric” signal

article Full Text OpenAlex 157 FWCI17.42658707

Highly sensitive strain sensors based on piezotronic tunneling junction

article Full Text OpenAlex 139 FWCI15.42863441