专题：Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
最新文献
Quartz Piezoelectric Resonant Force Sensor Chip—Chip Assembly and Thrust Test Experiments

article Full Text OpenAlex

High-Sensitivity and Fast-Response Piezotronic Pressure Sensors by Mechanical Stacking in Silicon Wafer

article Full Text OpenAlex

A review of recent advancements on materials and methods for microelectromechanical system-based devices

article Full Text OpenAlex

High-Stability Mechanical Frequency Sensing beyond the Linear Regime

article Full Text OpenAlex

Using Nonlinear CMOS-MEMS Resonators for Self-Encrypting Analog-to-Digital Conversion

article Full Text OpenAlex

Design, fabrication, and characterization of a novel cantilever-based PMUT incorporating a central spring-like folded beam with enhanced transmission performance for air applications

article Full Text OpenAlex

Flip-Chip Bonded Dual-Substrate RF MEMS Switch with SOI Cantilever

article Full Text OpenAlex

Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm

article Full Text OpenAlex

Frequency stability enhancement of MEMS resonator using Duffing nonlinearity

article Full Text OpenAlex

Micromanufacturing Process of Complex 3D FeCo Core Microwindings for Magnetic Flux Modulation in Micromotors

article Full Text OpenAlex

近5年高被引文献
Computational Electrodynamics

book Full Text OpenAlex 869 FWCI24.3725

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

article Full Text OpenAlex 389 FWCI141.5275

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

review Full Text OpenAlex 386 FWCI29.248

Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex 313 FWCI69.7771

Microelectromechanical Systems (MEMS) for Biomedical Applications

review Full Text OpenAlex 210 FWCI17.6006

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

article Full Text OpenAlex 197 FWCI14.9954

A method for quantitatively separating the piezoelectric component from the as-received “Piezoelectric” signal

article Full Text OpenAlex 174 FWCI13.1936

Nanomechanical Resonators: Toward Atomic Scale

review Full Text OpenAlex 160 FWCI21.5941

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

article Full Text OpenAlex 150 FWCI19.8265

Highly sensitive strain sensors based on piezotronic tunneling junction

article Full Text OpenAlex 147 FWCI11.4833