专题：Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
最新文献
Sub-Terahertz 2D and 3D Beam Scanning Using Graphene-Based Binary RIS for 6G Applications

article Full Text OpenAlex

Openvac: An Open-Source Low-Cost Fine Vacuum Sensor

preprint Full Text OpenAlex

A Thermal-Robust Bandwidth Expansion Method for MEMS Gyroscopes Based on Parameter Self-Adjustment

article Full Text OpenAlex

Development and wafer-level characterization of the first production of DC-RSD sensors at FBK

article Full Text OpenAlex

Exploring unique design features of the Monolithic Stitched Sensor with Timing (MOST): yield, powering, timing, and sensor reverse bias

article Full Text OpenAlex

Evaluation of dynamical-billiard-shaped chambers as divergent elements of passive micromixers

article Full Text OpenAlex

Mechanism of Frequency Splitting in Micro Hemispherical Resonator with T-Shape Masses: Study on the Harmonic Error Order Characteristics

article Full Text OpenAlex

Design and simulation analysis of a cylindrical shell capacitive pressure sensor for noninvasive measurement of low pressure

article Full Text OpenAlex

Low Phase Noise, Dual-Frequency Pierce MEMS Oscillators with Direct Print Additively Manufactured Amplifier Circuits

article Full Text OpenAlex

Exact multi-field coupling modeling and analysis of piezoelectric semiconductor plates

article Full Text OpenAlex

近5年高被引文献
Computational Electrodynamics

book Full Text OpenAlex 883 FWCI10.848

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

review Full Text OpenAlex 313 FWCI5.111

Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex 295 FWCI0

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

article Full Text OpenAlex 294 FWCI50.773

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

review Full Text OpenAlex 287 FWCI8.315

Cavity optomechanical sensing

article Full Text OpenAlex 165 FWCI13.369

Microelectromechanical Systems (MEMS) for Biomedical Applications

review Full Text OpenAlex 140 FWCI3.695

A method for quantitatively separating the piezoelectric component from the as-received “Piezoelectric” signal

article Full Text OpenAlex 138 FWCI12.344

Dynamical Backaction Magnomechanics

article Full Text OpenAlex 133 FWCI10.992

Highly sensitive strain sensors based on piezotronic tunneling junction

article Full Text OpenAlex 129 FWCI11.704