专题：Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
最新文献
VARIATIONAL APPROACH TO MICRO-ELECTRO-MECHANICAL SYSTEMS

article Full Text OpenAlex

A Self-Alignment Method for Vehicle-Mounted MEMS IMU

article Full Text OpenAlex

Teleportation-based speed meter for precision measurement

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Smart adaptive trigger sensing powered by edge intelligence and digital twin for energy-efficient wireless Structural Health Monitoring

article Full Text OpenAlex

Metrological validation of chromium atom lithography gratings via 633 nm wavelength traceability chain

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A High-Sensitivity, Lamination-Free Stretchable Temperature Sensor Array for On-Skin Wireless Temperature Monitoring and Mapping in Healthcare Applications

article Full Text OpenAlex

Advanced carbon-based piezoresistive sensors: From technological development to practical applications

article Full Text OpenAlex

Cutoff Wavelength Control of GeSn HOT Infrared Detectors by Sn Concentration

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Proposal for introduction of composition-graded extrinsic base layers into fine emitter InP HBTs

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Fluorinated Bismaleimide Composites with Enhanced Piezoelectric Characteristics for Motion Monitoring

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近5年高被引文献
Computational Electrodynamics

book Full Text OpenAlex 869 FWCI10.75824483

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

article Full Text OpenAlex 373 FWCI364.25837587

Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

review Full Text OpenAlex 357 FWCI38.96007683

Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex 304 FWCI112.22721569

Microelectromechanical Systems (MEMS) for Biomedical Applications

review Full Text OpenAlex 197 FWCI20.45287686

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

article Full Text OpenAlex 175 FWCI19.42453973

A method for quantitatively separating the piezoelectric component from the as-received “Piezoelectric” signal

article Full Text OpenAlex 163 FWCI17.98157392

Nanomechanical Resonators: Toward Atomic Scale

review Full Text OpenAlex 145 FWCI83.34364026

Highly sensitive strain sensors based on piezotronic tunneling junction

article Full Text OpenAlex 142 FWCI15.65062915

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

article Full Text OpenAlex 134 FWCI22.22844235