专题：Advanced MEMS and NEMS Technologies

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
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近5年高被引文献
Thousands of conductance levels in memristors integrated on CMOS

article Full Text OpenAlex 498 FWCI36.2693

Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"

preprint Full Text OpenAlex 323 FWCI0

Microelectromechanical Systems (MEMS) for Biomedical Applications

article Full Text OpenAlex 243 FWCI12.7814

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

article Full Text OpenAlex 229 FWCI16.6866

Recent Advances of Capacitive Sensors: Materials, Microstructure Designs, Applications, and Opportunities

article Full Text OpenAlex 197 FWCI14.4019

Controlled propulsion of micro/nanomotors: operational mechanisms, motion manipulation and potential biomedical applications

review Full Text OpenAlex 193 FWCI2.973

Nanomechanical Resonators: Toward Atomic Scale

article Full Text OpenAlex 189 FWCI9.2985

A Review of Silicon‐Based Integrated Optical Switches

article Full Text OpenAlex 183 FWCI13.3347

Thin-film PMUTs: a review of over 40 years of research

article Full Text OpenAlex 182 FWCI13.3147

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

article Full Text OpenAlex 174 FWCI8.6304