专题：Plasma Diagnostics and Applications

This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
最新文献
Kobayashi potential-based boundary approach to H-polarized plane wave scattering by PEMC strip in anisotropic cold plasma

article Full Text OpenAlex

Effects of Electric Field Nonuniformity on DC Positive Streamer Discharge of SF6/N2 Mixed Gas

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Decoupling beam power and beam energy on ASDEX Upgrade NBI with an in-situ variable extraction gap system

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Helium metastable density determination in the COST reference source by absolutely calibrated optical emission spectroscopy

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Theory and Finite-Element Simulation Methodology of Gas Discharge Plasmas

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First Demonstration of an All-Solid-State Room Temperature 2-THz Front End Viable for Space Applications

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Optimal Design of High-Power Density Medium-Voltage Direct Current Bipolar Power Cables for Lunar Power Transmission

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Spatially resolved Thomson scattering measurements of electron properties across the acceleration region of a high-power magnetically shielded Hall effect thruster

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Design and testing of a Mini-RF plasma thruster with permanent magnets

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Code-Division Space-Time Fountain Code for Plasma Sheath Communication

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近5年高被引文献
The 2022 Plasma Roadmap: low temperature plasma science and technology

article Full Text OpenAlex 432 FWCI45.85750285

Applications of Cold Atmospheric Pressure Plasma Technology in Medicine, Agriculture and Food Industry

article Full Text OpenAlex 250 FWCI27.68458911

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

review Full Text OpenAlex 209 FWCI14.02725771

Nitrogen fixation in an electrode-free microwave plasma

article Full Text OpenAlex 159 FWCI16.23956344

Degradation of contaminants in plasma technology: An overview

review Full Text OpenAlex 151 FWCI15.00226337

Data Needs for Modeling Low-Temperature Non-Equilibrium Plasmas: The LXCat Project, History, Perspectives and a Tutorial

article Full Text OpenAlex 149 FWCI10.81840791

In-orbit demonstration of an iodine electric propulsion system

article Full Text OpenAlex 136 FWCI8.8014166

A state-of-the-art review on the multifunctional self-cleaning nanostructured coatings for PV panels, CSP mirrors and related solar devices

review Full Text OpenAlex 133 FWCI14.48468578

Electric Propulsion Methods for Small Satellites: A Review

review Full Text OpenAlex 127 FWCI7.9762838

Low-Temperature Plasma for Biology, Hygiene, and Medicine: Perspective and Roadmap

article Full Text OpenAlex 126 FWCI14.69293835