专题：Advancements in Photolithography Techniques

This cluster of papers focuses on electron beam lithography, nanofabrication, and resolution limits in lithography techniques. It explores the applications of extreme ultraviolet lithography, chemically amplified resists, and high-resolution patterning materials. The cluster also discusses the challenges related to line edge roughness and mask design in nanolithography.
最新文献
Reliability-Driven HLS Binding: A Simulated Annealing Approach to Minimize Aging and Process Variation in Digital Circuits

article Full Text OpenAlex

Distributional Drift Detection in Medical Imaging with Sketching and Fine-Tuned Transformer

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X-ray tube design optimization methods based on CST particle studio

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Development of High‐Performance Multilayer Monochromators

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MOSFET Compact Model Recalibration Based on Product-Related Layouts Using Bayesian Optimization

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NeuroDendriteNet for Wafer Map Defect Pattern Recognition: Overcoming Variability with Multi-Scale and Attention Mechanisms

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Self-calibration of microscopes based on 3D micro standards

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Navigating Scaling Methods Using High-K/2D Integration in a Transistor

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Design-Aware Full-Chip Warpage Modeling for STCO: Bridging Reliability and Design for a New Era of Advanced Systems

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LLRF system design for HUST ultrafast electron diffraction

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近5年高被引文献
Defect and Diffusion Forum

paratext Full Text OpenAlex 534 FWCI0

mpi4py: Status Update After 12 Years of Development

article Full Text OpenAlex 213 FWCI12.447

Evolution in Lithography Techniques: Microlithography to Nanolithography

review Full Text OpenAlex 149 FWCI4.246

High-NA EUV lithography: current status and outlook for the future

article Full Text OpenAlex 107 FWCI9.935

Binding energy referencing in X-ray photoelectron spectroscopy

review Full Text OpenAlex 102 FWCI8.681

Defect-GAN: High-Fidelity Defect Synthesis for Automated Defect Inspection

article Full Text OpenAlex 101 FWCI31.407

Trends in photoresist materials for extreme ultraviolet lithography: A review

review Full Text OpenAlex 93 FWCI4.243

A Review of Recent Research on Heat Transfer in Three-Dimensional Integrated Circuits (3-D ICs)

review Full Text OpenAlex 92 FWCI1.611

DIC Challenge 2.0: Developing Images and Guidelines for Evaluating Accuracy and Resolution of 2D Analyses

article Full Text OpenAlex 74 FWCI8.356

py4DSTEM: A Software Package for Four-Dimensional Scanning Transmission Electron Microscopy Data Analysis

article Full Text OpenAlex 71 FWCI16.49