专题:Copper Interconnects and Reliability

This cluster of papers focuses on the development and characterization of low dielectric constant (low-k) materials for microelectronics, with an emphasis on their application in copper metallization and interconnect scaling. The papers cover topics such as electromigration, thin films, plasma processing, diffusion barriers, and the electrical resistivity of nanowires.
最新文献
A review on copper alloys with high strength and high electrical conductivity

review Full Text OpenAlex

Materials for Interconnections of Integrated Circuits with Design Standards Less Than 5 nm

article Full Text OpenAlex

Surface roughness analysis of Cu seed layer deposited on α-Ti diffusion barrier layer: A molecular dynamics simulation study

article Full Text OpenAlex

Enhancing the Sputtering Process with Plasma-Assisted Electrical Discharge for Thin Film Fabrication in Advanced Applications

article Full Text OpenAlex

Exceptional Lithography Sensitivity Boosted by Hexafluoroisopropanols in Photoresists

preprint Full Text OpenAlex

Appending Coronene Diimide with Carbon Nanohoops Allows for Rapid Intersystem Crossing in Neat Film

article Full Text OpenAlex

Investigation of the Tribological Properties and Corrosion Resistance of Multilayer Si-DLC Films on the Inner Surfaces of N80 Steel Pipes

article Full Text OpenAlex

Phase-field simulation of conductive inclusion evolution in highly symmetric oriented single crystal metal interconnects under anisotropic interface diffusion induced by electromigration

article Full Text OpenAlex

Understanding the stability of advanced inorganic-organic hybrid thin films for advanced resist applications

article Full Text OpenAlex

Oxidation state of cobalt oxide in thermal-cyclic atomic layer etching of cobalt by plasma oxidation and organometallization

article Full Text OpenAlex

近5年高被引文献
Coulomb interaction in thin semiconductor and semimetal films

book-chapter Full Text OpenAlex 468 FWCI126.88840274

Tracking the sliding of grain boundaries at the atomic scale

article Full Text OpenAlex 222 FWCI27.30634521

Understanding\nGrain Boundary Electrical Resistivity\nin Cu: The Effect of Boundary Structure

article Full Text OpenAlex 155 FWCI7.26036119

A review on copper alloys with high strength and high electrical conductivity

review Full Text OpenAlex 127 FWCI21.50671023

Orbital Rashba effect in a surface-oxidized Cu film

article Full Text OpenAlex 111 FWCI7.51787668

Development of electrodeposited multilayer coatings: A review of fabrication, microstructure, properties and applications

review Full Text OpenAlex 102 FWCI5.68424822

Materials for interconnects

article Full Text OpenAlex 94 FWCI6.45353347

Materials Quest for Advanced Interconnect Metallization in Integrated Circuits

review Full Text OpenAlex 84 FWCI9.13418172

The bonding characteristics of the Cu(111)/WC(0001) interface: An insight from first-principle calculations

article Full Text OpenAlex 84 FWCI7.97072271

Characterization of NMR, IR, and Raman spectra for siloxanes and silsesquioxanes: a mini review

review Full Text OpenAlex 82 FWCI10.08612751