专题:Copper Interconnects and Reliability

This cluster of papers focuses on the development and characterization of low dielectric constant (low-k) materials for microelectronics, with an emphasis on their application in copper metallization and interconnect scaling. The papers cover topics such as electromigration, thin films, plasma processing, diffusion barriers, and the electrical resistivity of nanowires.
最新文献
Formation of condensed CHF 3 layer on SiO 2 film at cryogenic temperatures for etching process applications

article Full Text OpenAlex

Research on high-quality and low-damage liquid film shearing polishing of 4H-SiC and its surface/subsurface damage evolution

article Full Text OpenAlex

The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films

article Full Text OpenAlex

Optimization of Gold Thin Films by DC Magnetron Sputtering: Structure, Morphology, and Conductivity

article Full Text OpenAlex

Preparation of W-Cu Composite Powders by Hydrogen Reduction of WO3 And Copper Nitrate Mixture

article Full Text OpenAlex

Depth Profiling of Oxygen Migration in Ta/HfO2 Stacks During Ionic Liquid Gating

preprint Full Text OpenAlex

Critical Lattice Strain for Electromigration - Revisiting the Blech Critical Product

preprint Full Text OpenAlex

Cfd Simulation of Dual Showerhead Configuration: Key to Uniform Large-Scale Cvd Sic Coatings

preprint Full Text OpenAlex

The Thermal, Electrical and Magnetic Characterization of Nickel Thin Films Deposited Via Dc Sputtering

preprint Full Text OpenAlex

Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM

article Full Text OpenAlex

近5年高被引文献
Coulomb interaction in thin semiconductor and semimetal films

book-chapter Full Text OpenAlex 469 FWCI129.11451507

Tracking the sliding of grain boundaries at the atomic scale

article Full Text OpenAlex 229 FWCI27.79835143

A review on copper alloys with high strength and high electrical conductivity

review Full Text OpenAlex 141 FWCI23.87752868

Materials Quest for Advanced Interconnect Metallization in Integrated Circuits

review Full Text OpenAlex 88 FWCI9.56914276

Characterization of NMR, IR, and Raman spectra for siloxanes and silsesquioxanes: a mini review

review Full Text OpenAlex 84 FWCI10.33213062

Development of lead-free interconnection materials in electronic industry during the past decades: Structure and properties

article Full Text OpenAlex 71 FWCI7.53527042

Research Progress on Bonding Wire for Microelectronic Packaging

review Full Text OpenAlex 67 FWCI11.11422118

Development of face-to-face and face-to-back ultra-fine pitch Cu-Cu hybrid bonding

article Full Text OpenAlex 64 FWCI23.62811779

Enabling Next Generation 3D Heterogeneous Integration Architectures on Intel Process

article Full Text OpenAlex 60 FWCI22.15136043

Copper Bonding Technology in Heterogeneous Integration

article Full Text OpenAlex 58 FWCI9.62126609